JPH0330084B2 - - Google Patents
Info
- Publication number
- JPH0330084B2 JPH0330084B2 JP1760984A JP1760984A JPH0330084B2 JP H0330084 B2 JPH0330084 B2 JP H0330084B2 JP 1760984 A JP1760984 A JP 1760984A JP 1760984 A JP1760984 A JP 1760984A JP H0330084 B2 JPH0330084 B2 JP H0330084B2
- Authority
- JP
- Japan
- Prior art keywords
- measuring force
- arm
- stylus
- arm holder
- coil spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 241001422033 Thestylus Species 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000003746 surface roughness Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1760984A JPS60161503A (ja) | 1984-02-01 | 1984-02-01 | 表面粗さ測定機用検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1760984A JPS60161503A (ja) | 1984-02-01 | 1984-02-01 | 表面粗さ測定機用検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60161503A JPS60161503A (ja) | 1985-08-23 |
JPH0330084B2 true JPH0330084B2 (en]) | 1991-04-26 |
Family
ID=11948623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1760984A Granted JPS60161503A (ja) | 1984-02-01 | 1984-02-01 | 表面粗さ測定機用検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60161503A (en]) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH082647B2 (ja) * | 1988-08-17 | 1996-01-17 | 日立テクノエンジニアリング株式会社 | スクリーンレスパターン描画装置 |
DE69208979T2 (de) * | 1991-07-15 | 1996-07-25 | Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka | Freitragender Ausleger für Atomkraftmikroskop und Verfahren zu dessen Herstellung |
IT1299902B1 (it) * | 1998-03-13 | 2000-04-04 | Marposs Spa | Testa, apparecchiatura e metodo per il controllo di dimensioni lineari di pezzi meccanici. |
JP4681779B2 (ja) * | 2001-09-25 | 2011-05-11 | キヤノン株式会社 | 表面性識別装置、及び画像形成装置 |
KR101219691B1 (ko) | 2006-05-03 | 2013-01-09 | 현대자동차주식회사 | 크랙 판별장치 |
JP6122312B2 (ja) * | 2013-02-28 | 2017-04-26 | 株式会社ミツトヨ | 形状測定機 |
JP6189153B2 (ja) * | 2013-09-18 | 2017-08-30 | 株式会社ミツトヨ | 梃子式測定器 |
CN109470136B (zh) * | 2018-12-13 | 2020-11-13 | 浙江正同管业有限公司 | 一种用于冷轧带钢的平面度检测装置 |
-
1984
- 1984-02-01 JP JP1760984A patent/JPS60161503A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60161503A (ja) | 1985-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |